Part 0 | Introduction to MEMS | KTU

Course Introduction: MEMS (Micro-Electro-Mechanical Systems)
📌 This lecture series covers MEMS (EC 465), an elective subject for seventh-semester Electronics and Communication Engineering students.
🔬 MEMS is defined as miniaturized mechanical and electromechanical elements created using micro-fabrication techniques.
📏 MEMS components typically range in size from 20 micrometers ($\mu$m) to 1 millimeter (mm), which is comparable to human hair diameter (20 $\mu$m to 180 $\mu$m).

MEMS Components and Focus Areas
💡 Key functional elements discussed will be micro-sensors and micro-actuators.
📚 The syllabus covers fabrication techniques, mechanical concepts, actuation and sensing techniques, and scaling laws in miniaturization.
🧪 Topics also include MEMS materials, micro-manufacturing, packaging, bonding techniques, and an overview of specialized areas like RF MEMS and NEMS.

Key Points & Insights
➡️ The course will begin the first module, focusing on MEMS microsystems and their applications, in the subsequent session.
➡️ MEMS technology fundamentally involves structures between 1 $\mu$m and 100 $\mu$m in size, which are the focus of micro-fabrication.
➡️ Students should prepare for discussions on fabrication and working principles of these miniaturized systems.

📸 Video summarized with SummaryTube.com on Nov 19, 2025, 11:59 UTC